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Vision Datum  |  SKU: iBt-UV16KT

iBt-UV16KT 16K UV TDI Line Scan Camera for Wafer Inspection

$21,850.00
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FAQ

Q1. What is the resolution of the iBt-UV16KT?
It provides 16384 × 256 resolution, making it a 16K-class UV TDI line scan camera.

Q2. Is the iBt-UV16KT suitable for wafer inspection?
Yes. It is specifically suited for wafer defect detection, semiconductor inspection, surface inspection, and particle detection.

Q3. What does 256-TDI provide?
The 256-TDI architecture accumulates signals across multiple sensor stages, improving sensitivity for detecting weak or subtle optical features.

Q4. What is the pixel size?
The camera uses 5 μm pixels, supporting high-resolution imaging of wafer surfaces and semiconductor features.

Q5. What is the maximum line rate?
The camera supports a line rate of up to 280 kHz.

Q6. What interface does the camera use?
It uses a CXP12 interface for high-speed, high-bandwidth image transmission.

Q7. What lens mount does the camera support?
The iBt-UV16KT uses an M95 mount, suitable for large-format optical systems.

Product Description

The iBt-UV16KT is a high-resolution 16K UV TDI line scan camera designed for advanced wafer inspection and semiconductor imaging. Featuring 16384 × 256 resolution, 256-TDI architecture, and 5 μm pixels, it provides fine spatial resolution and enhanced sensitivity for detecting subtle defects and surface variations.

With a 280 kHz line rate and CXP12 interface, the camera supports high-speed image acquisition for demanding semiconductor inspection systems. Its high-resolution TDI architecture makes it particularly suitable for wafer defect detection, semiconductor inspection, UV fluorescence analysis, and precision surface inspection.

Key Features

  • 16K resolution with 16384 active pixels.
  • 256-TDI architecture for enhanced imaging sensitivity.
  • 5 μm pixel size for fine wafer surface details.
  • 280 kHz line rate for high-speed inspection.
  • CXP12 interface for high-bandwidth image transmission.
  • M95 mount for large-format optical integration.

Wafer & Semiconductor Inspection

The iBt-UV16KT is designed for high-resolution wafer inspection, where small surface defects, contamination, particles, scratches, and pattern variations need to be detected across large wafer areas.

The combination of 16K resolution and 256-TDI provides high spatial detail and improved signal accumulation, making it suitable for demanding semiconductor inspection systems.

Typical Applications

  • Wafer Defect Detection
  • Semiconductor Wafer Inspection
  • UV Wafer Inspection
  • Surface Defect Inspection
  • Particle & Contamination Detection
  • Semiconductor Pattern Inspection
  • Photolithography Inspection
  • Advanced Scientific Imaging

Specifications

 Model
iBt-UV16KT
Resolution
16384×256
TDI
256-TDI
Line Frequency
280kHz
Pixel Size
 5μm
Interface
CXP12
Lens Mount M72

Payment & Security

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